The CNI Nanofabrication Clean Room and EBL is a 5,000-sq. ft. facility in the Morris A. Schapiro Center for Engineering and Physical Science Research (CEPSR) including a satellite Clean Room in the North West Corner building. It is dedicated to providing the processing tools, instrumentation, technical expertise, and a team-teaching environment to support and stimulate collaborative research in nanoscale science and engineering. The facility supports the creation and evaluation of devices and materials with state-of-the-art fabrication and characterization equipment. Applications include nanoelectronic and nanophotonic devices, micro and nano-electromechanical systems (MEMS/NEMS), flexible electronics, bio-electronics, nano-bio interfaces, and more.